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Glove Permeation by Semiconductor Processing Mixtures: Predicted and Experimental Results.

PB92136175

Publication Date	1991
Personal Author	Zellers, E. T.
Page Count	136
Abstract	A series of investigations of solvent permeation through clothing designed to offer protection against contact with hazardous chemicals was conducted. Variables studied included solvent type, glove type, temperature, exposure profile, mixtures of solvents, and post exposure thermal decontamination. The highest level of permeation resistance to the photoresists and related formulations containing glycol ether derivatives either in neat form or in mixtures with other solvents was generally provided by butyl rubber gloves. Nitrile rubber gloves also provided a high level of protection, but increased temperature or repeated exposures comprised their barrier properties. Gloves composed of natural rubber or blends of natural rubber with other polymers were less effective against the heat solvents and photoresist formulations. Permeation of the glycol ether derivatives in the formulations was faster for most glove samples than had been predicted based on the permeation behavior of the pure glycol ethers. Use of thin surgical type gloves composed of natural rubber or polyvinyl-chloride beneath the chemically protective gloves increased the net permeation resistance marginally. Use of these gloves alone offered no effective permeation resistance. Even at temperatures as high as 50 degrees-C, butyl rubber gloves provided exceptionally good resistance to permeation. The decrease in permeation resistance was due to increases in the rates of diffusion rather than to increases in solubility.
Keywords	Occupational safety and health Protective clothing Hazardous materials Gloves Solvents Electronics industry Semiconductor devices Natural rubber Permeability Performance evaluation Polyvinyl chloride Glycols Industrial safety
Source Agency	National Institute for Occupational Safety and Health
NTIS Subject Category	57U - Public Health & Industrial Medicine 95G - Protective Equipment 94H - Industrial Safety Engineering
Corporate Authors	Michigan Univ., Ann Arbor. Dept. of Environmental and Industrial Health.; National Inst. for Occupational Safety and Health, Cincinnati, OH.
Supplemental Notes	Sponsored by National Inst. for Occupational Safety and Health, Cincinnati, OH.
Document Type	Technical Report
NTIS Issue Number	199209

Glove Permeation by Semiconductor Processing Mixtures: Predicted and Experimental Results.

Glove Permeation by Semiconductor Processing Mixtures: Predicted and Experimental Results.
PB92136175

Publication Date	1991
Personal Author	Zellers, E. T.
Page Count	136
Abstract	A series of investigations of solvent permeation through clothing designed to offer protection against contact with hazardous chemicals was conducted. Variables studied included solvent type, glove type, temperature, exposure profile, mixtures of solvents, and post exposure thermal decontamination. The highest level of permeation resistance to the photoresists and related formulations containing glycol ether derivatives either in neat form or in mixtures with other solvents was generally provided by butyl rubber gloves. Nitrile rubber gloves also provided a high level of protection, but increased temperature or repeated exposures comprised their barrier properties. Gloves composed of natural rubber or blends of natural rubber with other polymers were less effective against the heat solvents and photoresist formulations. Permeation of the glycol ether derivatives in the formulations was faster for most glove samples than had been predicted based on the permeation behavior of the pure glycol ethers. Use of thin surgical type gloves composed of natural rubber or polyvinyl-chloride beneath the chemically protective gloves increased the net permeation resistance marginally. Use of these gloves alone offered no effective permeation resistance. Even at temperatures as high as 50 degrees-C, butyl rubber gloves provided exceptionally good resistance to permeation. The decrease in permeation resistance was due to increases in the rates of diffusion rather than to increases in solubility.
Keywords	Occupational safety and health Protective clothing Hazardous materials Gloves Solvents Electronics industry Semiconductor devices Natural rubber Permeability Performance evaluation Polyvinyl chloride Glycols Industrial safety
Source Agency	National Institute for Occupational Safety and Health
NTIS Subject Category	57U - Public Health & Industrial Medicine 95G - Protective Equipment 94H - Industrial Safety Engineering
Corporate Authors	Michigan Univ., Ann Arbor. Dept. of Environmental and Industrial Health.; National Inst. for Occupational Safety and Health, Cincinnati, OH.
Supplemental Notes	Sponsored by National Inst. for Occupational Safety and Health, Cincinnati, OH.
Document Type	Technical Report
NTIS Issue Number	199209