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Details

Walk-Through Survey Report: Control Technology for Integrated Circuit Fabrication at NEC Electronics U.S.A., Inc., Electronics Arrays Division Mountain View, California.

PB83240747

Publication Date	1983
Personal Author	Mihlan, G. J.; Wilson, R. D.
Page Count	32
Abstract	A preliminary control technology assessment survey was conducted by Battelle Columbus Laboratories at NEC Electronics U.S.A., Inc., Electronic Arrays Division, Mountain View, CA. on January 13, 1982. The survey was conducted under a U.S. Environmental Protection Agency contract funded through an Interagency Agreement with the National Institute for Occupational Safety and Health. The facility manufactures metal oxide semiconductor (MOS) integrated circuits. A variety of process operations are used at the facility that should be considered for detailed investigation. These include plasma etching, ion implantation, LPCVD, and PECVD. The effectiveness of the local exhaust ventilation of the newer wet chemical benches should be evaluated and compared to the other benches.
Keywords	Environmental surveys Industrial medicine Manufacturing Fabrication Integrated circuits Occupational safety and health
Source Agency	National Institute for Occupational Safety and Health
NTIS Subject Category	57U - Public Health & Industrial Medicine 94D - Job Environment
Corporate Authors	Battelle Columbus Labs., OH.; Industrial Environmental Research Lab.-Cincinnati, OH.; National Inst. for Occupational Safety and Health, Cincinnati, OH. Div.
Supplemental Notes	Sponsored in part by National Inst. for Occupational Safety and Health, Cincinnati, OH. Div. of Physical Science and Engineering. and Industrial Environmental Research Lab.-Cincinnati, OH.
Document Type	Technical Report
Title Note	Technology rept.
NTIS Issue Number	198323

Walk-Through Survey Report: Control Technology for Integrated Circuit Fabrication at NEC Electronics U.S.A., Inc., Electronics Arrays Division Mountain View, California.

Walk-Through Survey Report: Control Technology for Integrated Circuit Fabrication at NEC Electronics U.S.A., Inc., Electronics Arrays Division Mountain View, California.
PB83240747

Publication Date	1983
Personal Author	Mihlan, G. J.; Wilson, R. D.
Page Count	32
Abstract	A preliminary control technology assessment survey was conducted by Battelle Columbus Laboratories at NEC Electronics U.S.A., Inc., Electronic Arrays Division, Mountain View, CA. on January 13, 1982. The survey was conducted under a U.S. Environmental Protection Agency contract funded through an Interagency Agreement with the National Institute for Occupational Safety and Health. The facility manufactures metal oxide semiconductor (MOS) integrated circuits. A variety of process operations are used at the facility that should be considered for detailed investigation. These include plasma etching, ion implantation, LPCVD, and PECVD. The effectiveness of the local exhaust ventilation of the newer wet chemical benches should be evaluated and compared to the other benches.
Keywords	Environmental surveys Industrial medicine Manufacturing Fabrication Integrated circuits Occupational safety and health
Source Agency	National Institute for Occupational Safety and Health
NTIS Subject Category	57U - Public Health & Industrial Medicine 94D - Job Environment
Corporate Authors	Battelle Columbus Labs., OH.; Industrial Environmental Research Lab.-Cincinnati, OH.; National Inst. for Occupational Safety and Health, Cincinnati, OH. Div.
Supplemental Notes	Sponsored in part by National Inst. for Occupational Safety and Health, Cincinnati, OH. Div. of Physical Science and Engineering. and Industrial Environmental Research Lab.-Cincinnati, OH.
Document Type	Technical Report
Title Note	Technology rept.
NTIS Issue Number	198323