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Details

Walk-Through Survey Report: Control Technology for Integrated Circuit Fabrication, Xerox Corporation, El Segundo, California.

PB83239053

Publication Date	1983
Personal Author	Mihlan, G. J.; Ungers, L. J.; Smith, R. K.; Mitchell, R. I.; Jones, J. H.
Page Count	47
Abstract	A preliminary control technology assessment survey was conducted at Xerox Corp., Microelectronics Center, Electronics Division, El Segundo, CA. on September 1, 1981. The survey was conducted by Battelle Columbus Laboratories under a U.S. Environmental Protection Agency contract funded through an Interagency Agreement with the National Institute for Occupational Safety and Health. The facility manufactures N-channel metal oxide semiconductor (NMOS) integrated circuits. The facility has developed industrial hygiene review procedures for evaluating all new and existing process equipment. Employees are trained in safety, use of personal protective equipment, and emergency response. Workers potentially exposed to arsenic are monitored for urinary arsenic levels. The facility should be considered a candidate for detailed study based on the diversity of process operations encountered and the use of state-of-the-art technology and process equipment.
Keywords	Environmental surveys Industrial medicine Integrated circuits Fabrication Occupational safety and health Chemical processing
Source Agency	National Institute for Occupational Safety and Health
NTIS Subject Category	57U - Public Health & Industrial Medicine 94D - Job Environment 68G - Environmental Health & Safety
Corporate Authors	Battelle Columbus Labs., OH.; Industrial Environmental Research Lab.-Cincinnati, OH.; National Inst. for Occupational Safety and Health, Cincinnati, OH.; PEDCo-Environmental, Inc., Cincinnati, OH.
Supplemental Notes	Prepared in cooperation with PEDCO-Environmental, Inc., Cincinnati, OH. Sponsored in part by Industrial Environmental Research Lab.-Cincinnati, OH. and National Inst. for Occupational Safety and Health, Cincinnati, OH. Engineering Control Technology Branch.
Document Type	Technical Report
NTIS Issue Number	198324

Walk-Through Survey Report: Control Technology for Integrated Circuit Fabrication, Xerox Corporation, El Segundo, California.

Walk-Through Survey Report: Control Technology for Integrated Circuit Fabrication, Xerox Corporation, El Segundo, California.
PB83239053

Publication Date	1983
Personal Author	Mihlan, G. J.; Ungers, L. J.; Smith, R. K.; Mitchell, R. I.; Jones, J. H.
Page Count	47
Abstract	A preliminary control technology assessment survey was conducted at Xerox Corp., Microelectronics Center, Electronics Division, El Segundo, CA. on September 1, 1981. The survey was conducted by Battelle Columbus Laboratories under a U.S. Environmental Protection Agency contract funded through an Interagency Agreement with the National Institute for Occupational Safety and Health. The facility manufactures N-channel metal oxide semiconductor (NMOS) integrated circuits. The facility has developed industrial hygiene review procedures for evaluating all new and existing process equipment. Employees are trained in safety, use of personal protective equipment, and emergency response. Workers potentially exposed to arsenic are monitored for urinary arsenic levels. The facility should be considered a candidate for detailed study based on the diversity of process operations encountered and the use of state-of-the-art technology and process equipment.
Keywords	Environmental surveys Industrial medicine Integrated circuits Fabrication Occupational safety and health Chemical processing
Source Agency	National Institute for Occupational Safety and Health
NTIS Subject Category	57U - Public Health & Industrial Medicine 94D - Job Environment 68G - Environmental Health & Safety
Corporate Authors	Battelle Columbus Labs., OH.; Industrial Environmental Research Lab.-Cincinnati, OH.; National Inst. for Occupational Safety and Health, Cincinnati, OH.; PEDCo-Environmental, Inc., Cincinnati, OH.
Supplemental Notes	Prepared in cooperation with PEDCO-Environmental, Inc., Cincinnati, OH. Sponsored in part by Industrial Environmental Research Lab.-Cincinnati, OH. and National Inst. for Occupational Safety and Health, Cincinnati, OH. Engineering Control Technology Branch.
Document Type	Technical Report
NTIS Issue Number	198324