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Preliminary Industrial Hygiene Survey Report, Texas Instruments, Dallas, Texas.

PB83188078

Publication Date	1983
Personal Author	Smith, R. K.; Rose, S. A.; Ungers, L. G.
Page Count	19
Abstract	A preliminary control technology survey was conducted at Texas Instruments, Dallas, TX. on December 8, 1981. The survey was conducted by Battelle Columbus Laboratories and PEDCo Environmental, Inc., under U.S. EPA contract through an interagency agreement with the National Institute for Occupational Safety and Health as part of a control technology assessment for the electronic component industry. Texas Instruments manufactures integrated circuits using bipolar and metal oxide semiconductor technology. This preliminary survey focused on the following process operation: epitaxial growth, standard cleanup (a wet chemical operation), diffusion and chemical vapor deposition, photolithography, and metallization.
Keywords	Environmental surveys Industrial medicine Semiconductors Photolithiography Exposure Toxicity Inspection Hazardous materials Indoor air pollution Toxic substances Occupational safety and health Chemical vapor deposition
Source Agency	National Institute for Occupational Safety and Health
NTIS Subject Category	57U - Public Health & Industrial Medicine 57Y - Toxicology 94D - Job Environment 68G - Environmental Health & Safety
Corporate Authors	Battelle Columbus Labs., OH.; National Inst. for Occupational Safety and Health, Cincinnati, OH.
Supplemental Notes	Sponsored in part by National Inst. for Occupational Safety and Health, Cincinnati, OH. Prepared in cooperation with PEDCo Environmental, Inc.
Document Type	Technical Report
NTIS Issue Number	198315

Preliminary Industrial Hygiene Survey Report, Texas Instruments, Dallas, Texas.

Preliminary Industrial Hygiene Survey Report, Texas Instruments, Dallas, Texas.
PB83188078

Publication Date	1983
Personal Author	Smith, R. K.; Rose, S. A.; Ungers, L. G.
Page Count	19
Abstract	A preliminary control technology survey was conducted at Texas Instruments, Dallas, TX. on December 8, 1981. The survey was conducted by Battelle Columbus Laboratories and PEDCo Environmental, Inc., under U.S. EPA contract through an interagency agreement with the National Institute for Occupational Safety and Health as part of a control technology assessment for the electronic component industry. Texas Instruments manufactures integrated circuits using bipolar and metal oxide semiconductor technology. This preliminary survey focused on the following process operation: epitaxial growth, standard cleanup (a wet chemical operation), diffusion and chemical vapor deposition, photolithography, and metallization.
Keywords	Environmental surveys Industrial medicine Semiconductors Photolithiography Exposure Toxicity Inspection Hazardous materials Indoor air pollution Toxic substances Occupational safety and health Chemical vapor deposition
Source Agency	National Institute for Occupational Safety and Health
NTIS Subject Category	57U - Public Health & Industrial Medicine 57Y - Toxicology 94D - Job Environment 68G - Environmental Health & Safety
Corporate Authors	Battelle Columbus Labs., OH.; National Inst. for Occupational Safety and Health, Cincinnati, OH.
Supplemental Notes	Sponsored in part by National Inst. for Occupational Safety and Health, Cincinnati, OH. Prepared in cooperation with PEDCo Environmental, Inc.
Document Type	Technical Report
NTIS Issue Number	198315