National Technical Reports Library

The National Technical Information Service acquires, indexes, abstracts, and archives the largest collection of U.S. government-sponsored technical reports in existence. The NTRL offers online, free and open access to these authenticated government technical reports. Technical reports and documents in its repository may be available online for free either from the issuing federal agency, the U.S. Government Publishing Office’s Federal Digital System website, or through search engines.

Details

New Nanostructured Sensing Arrays for Hydride Detection.

PB2012106695

Publication Date	2007
Personal Author	Deininger, D. J.
Page Count	32
Abstract	The goal of the proposed project was to demonstrate the feasibility for the development of improved sensors for the detection of hydrides (including arsine and phosphine) for protection of worker health and safety. Current sensors suffer from severe limitations including lack of selectivity, and limited accuracy and lifetime. An electronic sensor system, capable of automatically warning workers about the presence of one of these toxic gases, would provide a substantial benefit for worker health and safety. The electronic sensor array technology demonstrated by Synkera in the Phase I project showed outstanding sensitivity and selectivity toward hydrides. The sensors are based upon a long lasting metal oxide material, combined with an innovative microsensor substrate, which promotes improved performance relative to conventional metal oxide sensors This project takes advantage of advances in nanotechnology, ceramic micromachining and materials chemistry to create sensors that are substantially better than current state of the art. These improved sensors will be the basis for improved personal and permanent monitors for increased protection of workers in the semiconductor industry. The products ultimately envisioned at the ultimate commercialization of this technology include Smart Gas Cards TM for employee personnel monitoring, as well as permanently fixtured, long lasting systems that provide general area alarms.
Keywords	Hydride detection Monitors Monitoring systems Nanotechnology Semiconductors Workplace monitoring Personal protection Volatiles Organic chemicals Organic compounds
Source Agency	National Institute for Occupational Safety and Health
Corporate Authors	National Inst. for Occupational Safety and Health, Washington, DC.
Document Type	Technical Report
Title Note	Final rept.
NTIS Issue Number	201214

New Nanostructured Sensing Arrays for Hydride Detection.

New Nanostructured Sensing Arrays for Hydride Detection.
PB2012106695

Publication Date	2007
Personal Author	Deininger, D. J.
Page Count	32
Abstract	The goal of the proposed project was to demonstrate the feasibility for the development of improved sensors for the detection of hydrides (including arsine and phosphine) for protection of worker health and safety. Current sensors suffer from severe limitations including lack of selectivity, and limited accuracy and lifetime. An electronic sensor system, capable of automatically warning workers about the presence of one of these toxic gases, would provide a substantial benefit for worker health and safety. The electronic sensor array technology demonstrated by Synkera in the Phase I project showed outstanding sensitivity and selectivity toward hydrides. The sensors are based upon a long lasting metal oxide material, combined with an innovative microsensor substrate, which promotes improved performance relative to conventional metal oxide sensors This project takes advantage of advances in nanotechnology, ceramic micromachining and materials chemistry to create sensors that are substantially better than current state of the art. These improved sensors will be the basis for improved personal and permanent monitors for increased protection of workers in the semiconductor industry. The products ultimately envisioned at the ultimate commercialization of this technology include Smart Gas Cards TM for employee personnel monitoring, as well as permanently fixtured, long lasting systems that provide general area alarms.
Keywords	Hydride detection Monitors Monitoring systems Nanotechnology Semiconductors Workplace monitoring Personal protection Volatiles Organic chemicals Organic compounds
Source Agency	National Institute for Occupational Safety and Health
Corporate Authors	National Inst. for Occupational Safety and Health, Washington, DC.
Document Type	Technical Report
Title Note	Final rept.
NTIS Issue Number	201214