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Characterization of electron cyclotron resonance hydrogen plasmas.

DE91001250

Publication Date	1990
Personal Author	Outten, C. A.; Barbour, J. C.; Wampler, W. R.
Page Count	30
Abstract	Electron cyclotron resonance (ECR) plasmas yield low energy and high ion density plasmas. The characteristics downstream of an ECR hydrogen plasma were investigated as a function of microwave power and magnetic field. A fast-injection Langmuir probe and a carbon resistance probe were used to determine plasma potential (V(sub p)), electron density (N(sub e)), electron temperature (T(sub e)), ion energy (T(sub i)), and ion fluence. Langmuir probe results showed that at 17 cm downstream from the ECR chamber the plasma characteristics are approximately constant across the center 7 cm of the plasma for 50 Watts of absorbed power. These results gave V(sub p) = 30 (plus minus) 5 eV, N(sub e) = 1 (times) 10(sup 8) cm(sup (minus)3), and T(sub e) = 10--13 eV. In good agreement with the Langmuir probe results, carbon resistance probes have shown that T(sub i) (le) 50 eV. Also, based on hydrogen chemical sputtering of carbon, the hydrogen (ion and energetic neutrals) fluence rate was determined to be 1 (times) 10(sup 16)/cm(sup 2)-sec. at a pressure of 1 (times) 10(sup (minus)4) Torr and for 50 Watts of absorbed power. 19 refs.
Keywords	Plasma Diagnostics Hydrogen ECR Heating Electron Density Electron Temperature Ion Temperature Langmuir Probe Physical Properties Plasma Density Sputtering Hydrogen plasma EDB/700102 EDB/656003
Source Agency	Technical Information Center Oak Ridge Tennessee
NTIS Subject Category	46G - Plasma Physics
Corporate Authors	Sandia National Labs., Albuquerque, NM.; Department of Energy, Washington, DC.
Supplemental Notes	National American Vacuum Society symposium (37th), Toronto (Canada), 8-12 Oct 1990. Sponsored by Department of Energy, Washington, DC.
Document Type	Conference Proceedings
NTIS Issue Number	199106
Contract Number	AC04-76DP00789

Characterization of electron cyclotron resonance hydrogen plasmas.

Characterization of electron cyclotron resonance hydrogen plasmas.
DE91001250

Publication Date	1990
Personal Author	Outten, C. A.; Barbour, J. C.; Wampler, W. R.
Page Count	30
Abstract	Electron cyclotron resonance (ECR) plasmas yield low energy and high ion density plasmas. The characteristics downstream of an ECR hydrogen plasma were investigated as a function of microwave power and magnetic field. A fast-injection Langmuir probe and a carbon resistance probe were used to determine plasma potential (V(sub p)), electron density (N(sub e)), electron temperature (T(sub e)), ion energy (T(sub i)), and ion fluence. Langmuir probe results showed that at 17 cm downstream from the ECR chamber the plasma characteristics are approximately constant across the center 7 cm of the plasma for 50 Watts of absorbed power. These results gave V(sub p) = 30 (plus minus) 5 eV, N(sub e) = 1 (times) 10(sup 8) cm(sup (minus)3), and T(sub e) = 10--13 eV. In good agreement with the Langmuir probe results, carbon resistance probes have shown that T(sub i) (le) 50 eV. Also, based on hydrogen chemical sputtering of carbon, the hydrogen (ion and energetic neutrals) fluence rate was determined to be 1 (times) 10(sup 16)/cm(sup 2)-sec. at a pressure of 1 (times) 10(sup (minus)4) Torr and for 50 Watts of absorbed power. 19 refs.
Keywords	Plasma Diagnostics Hydrogen ECR Heating Electron Density Electron Temperature Ion Temperature Langmuir Probe Physical Properties Plasma Density Sputtering Hydrogen plasma EDB/700102 EDB/656003
Source Agency	Technical Information Center Oak Ridge Tennessee
NTIS Subject Category	46G - Plasma Physics
Corporate Authors	Sandia National Labs., Albuquerque, NM.; Department of Energy, Washington, DC.
Supplemental Notes	National American Vacuum Society symposium (37th), Toronto (Canada), 8-12 Oct 1990. Sponsored by Department of Energy, Washington, DC.
Document Type	Conference Proceedings
NTIS Issue Number	199106
Contract Number	AC04-76DP00789