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Investigation of Multi-Layer Thin Films for Energy Storage.

DE2009947371

Publication Date	2009
Personal Author	Renk, T. J.; Monson, T.
Page Count	30
Abstract	We investigate here the feasibility of increasing the energy density of thin-film capacitors by construction of a multi-layer capacitor device through ablation and redeposition of the capacitor materials using a high-power pulsed ion beam. The deposition experiments were conducted on the RHEPP-1 facility at Sandia National Laboratories. The dielectric capacitor filler material was a composition of Lead- Lanthanum-Zirconium-Titanium oxide (PLZT). The energy storage can be increased by using material of intrinsically high dielectric constant, and constructing many thin layers of this material. For successful device construction, there are a number of challenging requirements including correct stoichiometric and crystallographic composition of the deposited PLZT. This report details some success in satisfying these requirements, even though the attempt at device manufacture was unsuccessful. The conclusion that 900DGC temperatures are necessary to reconstitute the deposited PLZT has implications for future manufacturing capability.
Keywords	Energy storage Multi-layer thin-films Investigation Energy density Capacitor device Deposition experiments
Source Agency	Technical Information Center Oak Ridge Tennessee
Corporate Authors	Sandia National Labs., Albuquerque, NM.; Department of Energy, Washington, DC.
Supplemental Notes	Sponsored by Department of Energy, Washington, DC.
Document Type	Technical Report
NTIS Issue Number	200913
Contract Number	DE-AC04-94AL85000

Investigation of Multi-Layer Thin Films for Energy Storage.

Investigation of Multi-Layer Thin Films for Energy Storage.
DE2009947371

Publication Date	2009
Personal Author	Renk, T. J.; Monson, T.
Page Count	30
Abstract	We investigate here the feasibility of increasing the energy density of thin-film capacitors by construction of a multi-layer capacitor device through ablation and redeposition of the capacitor materials using a high-power pulsed ion beam. The deposition experiments were conducted on the RHEPP-1 facility at Sandia National Laboratories. The dielectric capacitor filler material was a composition of Lead- Lanthanum-Zirconium-Titanium oxide (PLZT). The energy storage can be increased by using material of intrinsically high dielectric constant, and constructing many thin layers of this material. For successful device construction, there are a number of challenging requirements including correct stoichiometric and crystallographic composition of the deposited PLZT. This report details some success in satisfying these requirements, even though the attempt at device manufacture was unsuccessful. The conclusion that 900DGC temperatures are necessary to reconstitute the deposited PLZT has implications for future manufacturing capability.
Keywords	Energy storage Multi-layer thin-films Investigation Energy density Capacitor device Deposition experiments
Source Agency	Technical Information Center Oak Ridge Tennessee
Corporate Authors	Sandia National Labs., Albuquerque, NM.; Department of Energy, Washington, DC.
Supplemental Notes	Sponsored by Department of Energy, Washington, DC.
Document Type	Technical Report
NTIS Issue Number	200913
Contract Number	DE-AC04-94AL85000