National Technical Reports Library

The National Technical Information Service acquires, indexes, abstracts, and archives the largest collection of U.S. government-sponsored technical reports in existence. The NTRL offers online, free and open access to these authenticated government technical reports. Technical reports and documents in its repository may be available online for free either from the issuing federal agency, the U.S. Government Publishing Office’s Federal Digital System website, or through search engines.

Details

Process Development and Integration Lab (PDIL) + Measurements and Characterization (Presentation).

DE2008940606

Publication Date	2008
Personal Author	Nelson, B.
Page Count	10
Abstract	The Process Development and Integration Lab (PDIL) Vision is to integrate deposition, characterization, and processing by being flexible and robust; having a standardized transfer interface; and controlled sample ambient between tools. The benefits are: (1) answers to previously inaccessible research questions; (2) control and characterization of critical surfaces (interfaces) and how their impact on subsequent layers; (3) assess process-related source chemistry, surface chemistry and kinetics, and bulk reconstruction; (4) grow layers and alter interfaces using controlled processes and transfer ambients (without exposure to air); (5) develop new techniques, methodologies, device structures, materials, and tools (growth, processing, and analytical); and (6) improved collaborations with university and industry researchers.
Keywords	Solar energy Air Chemistry Deposition Kinetics Processing
Source Agency	Technical Information Center Oak Ridge Tennessee
Corporate Authors	National Renewable Energy Lab., Golden, CO.; Department of Energy, Washington, DC.
Supplemental Notes	Sponsored by Department of Energy, Washington, DC.
Document Type	Technical Report
NTIS Issue Number	200910
Contract Number	DE-AC36-99-GO10337

Process Development and Integration Lab (PDIL) + Measurements and Characterization (Presentation).

Process Development and Integration Lab (PDIL) + Measurements and Characterization (Presentation).
DE2008940606

Publication Date	2008
Personal Author	Nelson, B.
Page Count	10
Abstract	The Process Development and Integration Lab (PDIL) Vision is to integrate deposition, characterization, and processing by being flexible and robust; having a standardized transfer interface; and controlled sample ambient between tools. The benefits are: (1) answers to previously inaccessible research questions; (2) control and characterization of critical surfaces (interfaces) and how their impact on subsequent layers; (3) assess process-related source chemistry, surface chemistry and kinetics, and bulk reconstruction; (4) grow layers and alter interfaces using controlled processes and transfer ambients (without exposure to air); (5) develop new techniques, methodologies, device structures, materials, and tools (growth, processing, and analytical); and (6) improved collaborations with university and industry researchers.
Keywords	Solar energy Air Chemistry Deposition Kinetics Processing
Source Agency	Technical Information Center Oak Ridge Tennessee
Corporate Authors	National Renewable Energy Lab., Golden, CO.; Department of Energy, Washington, DC.
Supplemental Notes	Sponsored by Department of Energy, Washington, DC.
Document Type	Technical Report
NTIS Issue Number	200910
Contract Number	DE-AC36-99-GO10337