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Non-Equilibrium Approach to Doping of Wide Bandgap Materials by Molecular Beam Epitaxy.


DE2005824891

Publication Date 2004
Personal Author Tamargo, M. C.; Neumark, G. F.
Page Count 18
Abstract It is well known that it has been difficult to obtain good bipolar doping in a wide bandgap semiconductors. Developed a new doping technique, involving use of a standard dopant, together with a 'co-dopant' used to facilitate the introduction of the dopant, and have vastly alleviated this problem.
Keywords
  • Wide gap semiconductors
  • Doping
  • Energy gap
  • Semicondutor materials
  • Doped materials
  • Co-doping
  • Molecular beam epitaxy
Source Agency
  • Technical Information Center Oak Ridge Tennessee
Corporate Authors City Univ. of New York. Dept. of Physics.; Department of Energy, Washington, DC.; Columbia Univ., New York. Dept. of Applied Physics and Applied
Supplemental Notes Prepared in cooperation with Columbia Univ., New York. Dept. of Applied Physics and Applied Mathematics. Sponsored by Department of Energy, Washington, DC.
Document Type Technical Report
NTIS Issue Number 200519
Non-Equilibrium Approach to Doping of Wide Bandgap Materials by Molecular Beam Epitaxy.
Non-Equilibrium Approach to Doping of Wide Bandgap Materials by Molecular Beam Epitaxy.
DE2005824891

  • Wide gap semiconductors
  • Doping
  • Energy gap
  • Semicondutor materials
  • Doped materials
  • Co-doping
  • Molecular beam epitaxy
  • Technical Information Center Oak Ridge Tennessee
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