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Synchrotron X-Ray Study of Multilayers in Laue Geometry.

DE200515014490

Publication Date	2004
Personal Author	Kang, H. C.; Stephenson, G. B.; Liu, C.; Conley, R.; Macrander, A. T.; Maser, J.; Bajt, S.; Chapman, H. N.
Page Count	12
Abstract	Zone plates with depth to zone-width ratios as large as 100 are needed for focusing of hard x-rays. Such high aspect ratios are challenging to produce by lithography. We are investigating the fabrication of high-aspect-ratio linear zone plates by multilayer deposition followed by sectioning. As an initial step in this work, we present a synchrotron x-ray study of constant-period multilayers diffracting in Laue (transmission) geometry. Data are presented from two samples: a 200 period W/Si multilayer with d-spacing of 29 nm, and a 2020 period Mo/Si multilayer with d-spacing. By cutting and polishing we have successfully produced thin cross sections with section depths ranging from 2 to 12 mm. Transverse scattering profiles (rocking curves) across the Bragg reflection exhibit well-defined interference fringes originating from the depth of the sample, in agreement with dynamical diffraction theory for a multilayer in Laue geometry.
Keywords	Synchrotrons X ray diffraction Laue method Multilayers Optics Fabrication Lithography Cross sections Focusing Scattering Geometry
Source Agency	Technical Information Center Oak Ridge Tennessee
Corporate Authors	Lawrence Livermore National Lab., CA.; Department of Energy, Washington, DC.
Supplemental Notes	Sponsored by Department of Energy, Washington, DC.
Document Type	Technical Report
NTIS Issue Number	200521

Synchrotron X-Ray Study of Multilayers in Laue Geometry.

Synchrotron X-Ray Study of Multilayers in Laue Geometry.
DE200515014490

Publication Date	2004
Personal Author	Kang, H. C.; Stephenson, G. B.; Liu, C.; Conley, R.; Macrander, A. T.; Maser, J.; Bajt, S.; Chapman, H. N.
Page Count	12
Abstract	Zone plates with depth to zone-width ratios as large as 100 are needed for focusing of hard x-rays. Such high aspect ratios are challenging to produce by lithography. We are investigating the fabrication of high-aspect-ratio linear zone plates by multilayer deposition followed by sectioning. As an initial step in this work, we present a synchrotron x-ray study of constant-period multilayers diffracting in Laue (transmission) geometry. Data are presented from two samples: a 200 period W/Si multilayer with d-spacing of 29 nm, and a 2020 period Mo/Si multilayer with d-spacing. By cutting and polishing we have successfully produced thin cross sections with section depths ranging from 2 to 12 mm. Transverse scattering profiles (rocking curves) across the Bragg reflection exhibit well-defined interference fringes originating from the depth of the sample, in agreement with dynamical diffraction theory for a multilayer in Laue geometry.
Keywords	Synchrotrons X ray diffraction Laue method Multilayers Optics Fabrication Lithography Cross sections Focusing Scattering Geometry
Source Agency	Technical Information Center Oak Ridge Tennessee
Corporate Authors	Lawrence Livermore National Lab., CA.; Department of Energy, Washington, DC.
Supplemental Notes	Sponsored by Department of Energy, Washington, DC.
Document Type	Technical Report
NTIS Issue Number	200521