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Details

Industrial Applications of Low Temperature Plasmas.

DE200515013263

Publication Date	2001
Personal Author	Bardsley, J. N.
Page Count	50
Abstract	The use of low temperature plasmas in industry is illustrated by the discussion of four applications, to lighting, displays, semiconductor manufacturing and pollution control. The type of plasma required for each application is described and typical materiais are identified. The need to understand radical formation, ionization and metastable excitation within the discharge and the importance of surface reactions are stressed.
Keywords	Plasmas(Physics) Low temperatures Manufacturing Semiconductor divices Pollution control Illuminating Display devices Ionized gases
Source Agency	Technical Information Center Oak Ridge Tennessee
Corporate Authors	Lawrence Livermore National Lab., CA.; Department of Energy, Washington, DC.
Supplemental Notes	Sponsored by Department of Energy, Washington, DC.
Document Type	Technical Report
NTIS Issue Number	200601

Industrial Applications of Low Temperature Plasmas.

Industrial Applications of Low Temperature Plasmas.
DE200515013263

Publication Date	2001
Personal Author	Bardsley, J. N.
Page Count	50
Abstract	The use of low temperature plasmas in industry is illustrated by the discussion of four applications, to lighting, displays, semiconductor manufacturing and pollution control. The type of plasma required for each application is described and typical materiais are identified. The need to understand radical formation, ionization and metastable excitation within the discharge and the importance of surface reactions are stressed.
Keywords	Plasmas(Physics) Low temperatures Manufacturing Semiconductor divices Pollution control Illuminating Display devices Ionized gases
Source Agency	Technical Information Center Oak Ridge Tennessee
Corporate Authors	Lawrence Livermore National Lab., CA.; Department of Energy, Washington, DC.
Supplemental Notes	Sponsored by Department of Energy, Washington, DC.
Document Type	Technical Report
NTIS Issue Number	200601