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Exploring the Feasibility of Fabricating Micron-scale Components using Microcontact Printing.


DE2004820892

Publication Date 2003
Personal Author Myers, R. L.; Ritchey, M. B.; Stokes, R. N.; Casias, A. L.; Adams, D. P.; Oliver, A. D.; Emerson, J. A.
Page Count 52
Abstract Many microfabrication techniques are being developed for applications in microelectronics, microsensors, and micro-optics. Since the advent of microcomponents, designers have been forced to modify their designs to include limitations of current technology, such as the inability to make three-dimensional structures and the need for piece-part assembly. Many groups have successfully transferred a wide variety of patterns to both two-dimensional and three-dimensional substrates using microcontact printing. Microcontact printing is a technique in which a self-assembled monolayer (SAM) is patterned onto a substrate by transfer printing. The patterned layer can act as an etch resist or a foundation upon which to build new types of microstructures. We created a gold pattern with features as small as 1.2 micrometers using microcontact printing and subsequent processing. This approach looks promising for constructing single-level structures such as microelectrode arrays and sensors. It can be a viable technique for creating three-dimensional structures such as microcoils and microsprings if the right equipment is available to achieve proper alignment, and if a means is available to connect the final parts to other components in subsequent assembly operations. Microcontact printing provides a wide variety of new opportunities in the fabrication of microcomponents, and increases the options of designers.
Keywords
  • Microfabrication
  • Feasibility studies
  • Alignment
  • Fabrication
  • Gold
  • Microelectronics
  • Substrates
  • Printed circuits
  • Microstructures
  • Miniaturization
  • Microcontact printing
  • Micro-scale components
Source Agency
  • Technical Information Center Oak Ridge Tennessee
Corporate Authors Sandia National Labs., Albuquerque, NM.; Department of Energy, Washington, DC.
Supplemental Notes Sponsored by Department of Energy, Washington, DC.
Document Type Technical Report
NTIS Issue Number 200412
Exploring the Feasibility of Fabricating Micron-scale Components using Microcontact Printing.
Exploring the Feasibility of Fabricating Micron-scale Components using Microcontact Printing.
DE2004820892

  • Microfabrication
  • Feasibility studies
  • Alignment
  • Fabrication
  • Gold
  • Microelectronics
  • Substrates
  • Printed circuits
  • Microstructures
  • Miniaturization
  • Microcontact printing
  • Micro-scale components
  • Technical Information Center Oak Ridge Tennessee
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