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Several Technical Measures to Improve Ultra-High and Extreme-High Vacuum.

DE2003807887

Publication Date	2002
Personal Author	Dong, C.; Mehrotra, P.; Myneni, G. R.
Page Count	10
Abstract	Achieving UHV/XHV without high temperature bake outs is becoming essential in many applications. In this study, we investigated the use of inexpensive silica and titanium oxide thin film coatings on UHV/XHV chambers/components to reduce the adsorption of water on the chamber walls. Water can be cracked into oxygen and hydrogen in the material and act as one of the sources of the hydrogen. We have also implemented backing of the turbo pump with an ion pump for reducing the vacuum chamber pump down times into UHV/XHV pressure range. The results of these investigations are summarized in the paper.
Keywords	Vacuum systems Silica Titanium oxides Coatings Adsorption Hydrogen Oxygen Thin films Water
Source Agency	Technical Information Center Oak Ridge Tennessee
Corporate Authors	Old Dominion Coll., Norfolk, VA. Dept. of Physics.; Virginia Univ., Charlottesville.; Department of Energy, Washington, DC.; Jefferson Lab., Newport News, VA. Theory Group.
Supplemental Notes	Prepared in cooperation with Virginia Univ., Charlottesville. and Jefferson Lab., Newport News, VA. Theory Group. Sponsored by Department of Energy, Washington, DC.
Document Type	Technical Report
NTIS Issue Number	200321

Several Technical Measures to Improve Ultra-High and Extreme-High Vacuum.

Several Technical Measures to Improve Ultra-High and Extreme-High Vacuum.
DE2003807887

Publication Date	2002
Personal Author	Dong, C.; Mehrotra, P.; Myneni, G. R.
Page Count	10
Abstract	Achieving UHV/XHV without high temperature bake outs is becoming essential in many applications. In this study, we investigated the use of inexpensive silica and titanium oxide thin film coatings on UHV/XHV chambers/components to reduce the adsorption of water on the chamber walls. Water can be cracked into oxygen and hydrogen in the material and act as one of the sources of the hydrogen. We have also implemented backing of the turbo pump with an ion pump for reducing the vacuum chamber pump down times into UHV/XHV pressure range. The results of these investigations are summarized in the paper.
Keywords	Vacuum systems Silica Titanium oxides Coatings Adsorption Hydrogen Oxygen Thin films Water
Source Agency	Technical Information Center Oak Ridge Tennessee
Corporate Authors	Old Dominion Coll., Norfolk, VA. Dept. of Physics.; Virginia Univ., Charlottesville.; Department of Energy, Washington, DC.; Jefferson Lab., Newport News, VA. Theory Group.
Supplemental Notes	Prepared in cooperation with Virginia Univ., Charlottesville. and Jefferson Lab., Newport News, VA. Theory Group. Sponsored by Department of Energy, Washington, DC.
Document Type	Technical Report
NTIS Issue Number	200321