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Macro Stress Mapping on Thin Film Buckling.

DE2003807428

Publication Date	2002
Personal Author	Goudeau, P.; Villain, P.; Renault, P. O.; Tamura, N.; Celestre, R. S.; Padmore, H.
Page Count	10
Abstract	Thin films deposited by Physical Vapor Deposition techniques on substrates generally exhibit large residual stresses which may be responsible of thin film buckling in the case of compressive stresses. Since the 80's, a lot of theoretical work has been done to develop mechanical models but only a few experimental work has been done on this subject to support these theoretical approaches and nothing concerning local stress measurement mainly because of the small dimension of the buckling (few 10th micrometers). This paper deals with the application of micro beam X-ray diffraction available on synchrotron radiation sources for stress mapping analysis of gold thin film buckling.
Keywords	Thin films Buckling Delamination Gold Physical vapor deposition Residual stresses Strain mapping X-ray diffraction
Source Agency	Technical Information Center Oak Ridge Tennessee
Corporate Authors	Poitiers Univ. (France).; Department of Energy, Washington, DC.; Lawrence Berkeley National Lab., CA. Advanced Light Source.
Supplemental Notes	Prepared in cooperation with Lawrence Berkeley National Lab., CA. Advanced Light Source. Sponsored by Department of Energy, Washington, DC.
Document Type	Technical Report
NTIS Issue Number	200320

Macro Stress Mapping on Thin Film Buckling.

Macro Stress Mapping on Thin Film Buckling.
DE2003807428

Publication Date	2002
Personal Author	Goudeau, P.; Villain, P.; Renault, P. O.; Tamura, N.; Celestre, R. S.; Padmore, H.
Page Count	10
Abstract	Thin films deposited by Physical Vapor Deposition techniques on substrates generally exhibit large residual stresses which may be responsible of thin film buckling in the case of compressive stresses. Since the 80's, a lot of theoretical work has been done to develop mechanical models but only a few experimental work has been done on this subject to support these theoretical approaches and nothing concerning local stress measurement mainly because of the small dimension of the buckling (few 10th micrometers). This paper deals with the application of micro beam X-ray diffraction available on synchrotron radiation sources for stress mapping analysis of gold thin film buckling.
Keywords	Thin films Buckling Delamination Gold Physical vapor deposition Residual stresses Strain mapping X-ray diffraction
Source Agency	Technical Information Center Oak Ridge Tennessee
Corporate Authors	Poitiers Univ. (France).; Department of Energy, Washington, DC.; Lawrence Berkeley National Lab., CA. Advanced Light Source.
Supplemental Notes	Prepared in cooperation with Lawrence Berkeley National Lab., CA. Advanced Light Source. Sponsored by Department of Energy, Washington, DC.
Document Type	Technical Report
NTIS Issue Number	200320