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The National Technical Information Service acquires, indexes, abstracts, and archives the largest collection of U.S. government-sponsored technical reports in existence. The NTRL offers online, free and open access to these authenticated government technical reports. Technical reports and documents in its repository may be available online for free either from the issuing federal agency, the U.S. Government Publishing Office’s Federal Digital System website, or through search engines.

Details

DE200215000068

Publication Date	2001
Personal Author	Levi, D.
Page Count	4
Abstract	Presented at the 2001 NCPV Program Review Meeting: First application of real-time spectroscopic ellipsometry to in situ characterization of hot-wire CVD of hydrogenated-silicon thin films.
Keywords	Meetings Thin films Silicon Chemical vapor deposition Ellipsometers Characterization Morphology Hydrogen Surface roughness Real-time spectroscopic ellipsometry Raman scattering measurements
Source Agency	Technical Information Center Oak Ridge Tennessee
Corporate Authors	National Renewable Energy Lab., Golden, CO.; Department of Energy, Washington, DC.
Document Type	Conference Proceedings
NTIS Issue Number	200212
Contract Number	AC36-99-GO10337

Real-Time Characterization of Hot-Wire CVD Growth of Si:H Films using Spectroscopic Ellipsometry: Preprint.

Real-Time Characterization of Hot-Wire CVD Growth of Si:H Films using Spectroscopic Ellipsometry: Preprint.
DE200215000068

Publication Date	2001
Personal Author	Levi, D.
Page Count	4
Abstract	Presented at the 2001 NCPV Program Review Meeting: First application of real-time spectroscopic ellipsometry to in situ characterization of hot-wire CVD of hydrogenated-silicon thin films.
Keywords	Meetings Thin films Silicon Chemical vapor deposition Ellipsometers Characterization Morphology Hydrogen Surface roughness Real-time spectroscopic ellipsometry Raman scattering measurements
Source Agency	Technical Information Center Oak Ridge Tennessee
Corporate Authors	National Renewable Energy Lab., Golden, CO.; Department of Energy, Washington, DC.
Document Type	Conference Proceedings
NTIS Issue Number	200212
Contract Number	AC36-99-GO10337