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National Technical Reports Library

The National Technical Information Service acquires, indexes, abstracts, and archives the largest collection of U.S. government-sponsored technical reports in existence. The NTRL offers online, free and open access to these authenticated government technical reports. Technical reports and documents in its repository may be available online for free either from the issuing federal agency, the U.S. Government Publishing Office’s Federal Digital System website, or through search engines.




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Ion Implantation Processing Technologies for Telecommunications Electronics.


DE2001755647

Publication Date 2000
Personal Author Haynes, T. E.
Page Count 53
Abstract The subject CRADA was a collaboration between Oak Ridge National Laboratory and Bell Laboratories, Lucent Technologies (formerly AT and T Bell Laboratories) to explore the development of ion implantation technologies for silicon integrated circuit (IC) manufacturing.
Keywords
  • Integrated circuits
  • Ion implantation
  • Manufacturing
  • Ornl
  • Silicon
Source Agency
  • Technical Information Center Oak Ridge Tennessee
Corporate Authors Oak Ridge National Lab., TN.; Department of Energy, Washington, DC.
Document Type Technical Report
NTIS Issue Number 200125
Contract Number
  • AC05-00OR22725
Ion Implantation Processing Technologies for Telecommunications Electronics.
Ion Implantation Processing Technologies for Telecommunications Electronics.
DE2001755647

  • Integrated circuits
  • Ion implantation
  • Manufacturing
  • Ornl
  • Silicon
  • Technical Information Center Oak Ridge Tennessee
  • AC05-00OR22725
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